SYNOPSYS中
光柵表面輸入格式:
",~ b2]ym SN GRATING {X/Y} L/MM ORDER CWAV HIN VNUM jo,6Aog|u 其中,X-衍射發(fā)生在X-Z平面;Y-衍射發(fā)生在Y-Z平面。L/MM-給出了光柵刻線數(shù);ORDER-衍射級(jí)次;CWAV-波長(zhǎng);HIN-基底
折射率;
PoYr:=S? VNUM-相應(yīng)的阿貝數(shù);
=w',-+@ V~'k1P4 例子:
5wzQ?07T_ RLE
%'{V%IXQ ID GRATING_REAL FLAT
:0M'=~[ WAVL .6000000 .5000000 .4000000
qxf+# APS 1
8s QQK.N( POLARIZATION LINEAR Y
%:"
RzHN UNITS MM
2-8YSHlh OBB 0.000000 10.00000 1.00000 0.00000 0.00000 0.00000 1.00000
,(j>)g2Ob 0 AIR
J*}VV9H 1 GRA Y 500.0000 -1 0.500000 1.500000 50.000000
&e%{k@ 2 COATING PERF
b%3Q$wIJ6 2 CV 0.0000000000000 TH 1.00000000E-06
^D9
/ 2 N1 1.51628919 N2 1.52140818 N3 1.53084089
Z -pyFK\ 2 CTE 0.710000E-05
a4yOe*Ak,F 2 GTB S 'BK7 '
f|X[gL,B 3 COATING PERF
D",A$(lG 3 CV 0.0000000000000 TH 100.00000000 AIR
i Bi7| 3 AIR
pt=7~+r 4 CV 0.0000000000000 TH 0.00000000 AIR
utq.r_ 4 AIR
(YAI,Xnw END
uAp
-$? hA@zoIoe PER 0 0 0 0 0
GMEw