SYNOPSYS中
光柵表面輸入格式:
6
2t9SY SN GRATING {X/Y} L/MM ORDER CWAV HIN VNUM ,,G'Zur7 其中,X-衍射發(fā)生在X-Z平面;Y-衍射發(fā)生在Y-Z平面。L/MM-給出了光柵刻線數(shù);ORDER-衍射級次;CWAV-波長;HIN-基底
折射率;
5:%`&B\ VNUM-相應(yīng)的阿貝數(shù);
oiQ:&$y J:G{ 例子:
7h`t-6<!q RLE
= VMELk!z ID GRATING_REAL FLAT
Nt687 WAVL .6000000 .5000000 .4000000
T-Yb|@4 APS 1
bd[iD?epD] POLARIZATION LINEAR Y
b{;LbHq+G UNITS MM
2yVQqwQm OBB 0.000000 10.00000 1.00000 0.00000 0.00000 0.00000 1.00000
PoD/i@ 0 AIR
;f
/2u 1 GRA Y 500.0000 -1 0.500000 1.500000 50.000000
Zi<(>@z2 2 COATING PERF
~|{_Go{
Q 2 CV 0.0000000000000 TH 1.00000000E-06
a0's6C 2 N1 1.51628919 N2 1.52140818 N3 1.53084089
ysFp$!9Ux 2 CTE 0.710000E-05
l7U<]i GL 2 GTB S 'BK7 '
=.qPjp_Qd 3 COATING PERF
qyjVB/ko 3 CV 0.0000000000000 TH 100.00000000 AIR
zIr4!|X 3 AIR
Bnw^W_ 4 CV 0.0000000000000 TH 0.00000000 AIR
e^v\K[ 4 AIR
kb!W|l"PN END
jWso'K o)8VJ\ & PER 0 0 0 0 0
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