Measuring the angles and pyramidal error of high-precision prisms .j^=]3
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High-precision prisms, having maximum angle tolerances [$FiXH J
of 1 to 3 arcsec, find increasing application in optical metrology. CN!~(1v
Reported interferometric techniques for measuring HrH!
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the wedge angles of such prisms achieve a precision of up 6'6,ySo]
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques BZ}_
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric t:yJ~En]=
methods have made use of goniometers,2 h[}e5A]}
spectrometers,3 master prisms,4,5 and collimators.6 However, 0S$6j-"
in the literature there are few reported methods for v%!'vhf_K
measuring the pyramidal error, and the majority rely on 66Bx,]"6
visual observation,2,7,8 by which it is only possible to measure $@@@</VbP
pyramidal errors to the order of 1 arcmin ~Ref. 8!. ;noZmPa
In the new arrangement presented here, one can measure r9!,cs
the prism angle and the pyramidal error separately or in @D7/u88|
combination. This is possible because the measurements 08F~6e6a8
are made simultaneously but with different techniques.