Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309  |Next Article|  |Table of Contents| 8W1K3[Jj<  
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Design and Fabrication of Highly Efficient Fan-Out Elements T)Zt'M  
H. P. Herzig, D. Prongué and R. Dändliker `r'0"V  
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Institute of Microtechnology, University of Neuchâtel '!yS72{$2  
(Received March 26, 1990; accepted for publication May 19, 1990) FUzMc1zy|  
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