Abstract
*{Z=)k% Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1.
~0?B --------------------------------------------------------------------------------
[U"/A1p Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE)
{5d 5Y%& Correspondence Name and Address: SUGHRUE MION, PLLC
[9MbNJt 8~ 2100 PENNSYLVANIA AVENUE, N.W.
7~k=t!gTY SUITE 800
Y
ZuA"l Y WASHINGTON
\.Op6ECV9 DC
^kz(/c/