Abstract ']>@vo4kK{  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. :FB#,AOa_  
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) GYZzWN}U  
Correspondence Name and Address:     SUGHRUE MION, PLLC R
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  2100 PENNSYLVANIA AVENUE, N.W. N^B YNqr  
  SUITE 800 Uk5jZ|  
  WASHINGTON UV$v:>K#  
  DC o`7Bvh2  
  20037 ?$v#;n?@I  
  US [P407Sa"  
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Assignee Name and Adress: CARL ZEISS SMT AG | x/,  
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Serial No.: 931051 A2!7a}*1(  
Series Code: 10 @u#Tx%  
Filed: September 1, 2004 #O* ytZ  
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U.S. Current Class: 359/649 Jn-iIl  
U.S. Class at Publication: 359/649 hU@9vU<U  
Intern'l Class: G02B 003/00; G02B 009/00 lt[{u$