Abstract
U RW'*\Xjb Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1.
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y\Z-x Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE)
i%W,Y8\uf* Correspondence Name and Address: SUGHRUE MION, PLLC
t$=0 C 2100 PENNSYLVANIA AVENUE, N.W.
By@<N [I@ SUITE 800
T] nZ3EZ WASHINGTON
e3wFi,/@ DC
)G6]r$M>o0 20037
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j:0 US
|Js96>B : 4.3Bz1p&# Assignee Name and Adress: CARL ZEISS SMT AG
nFlj`k<]Y t?v0ylN Serial No.: 931051
@Ns^?#u~ Series Code: 10
x]k^JPX Filed: September 1, 2004
w>X33Ff]8@ ,7pO- :*g U.S. Current Class: 359/649
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