資源里面，介紹光刻的比較少， 今天分享一本最新介紹光刻技術(shù)的英文教材Optical Lithography - Here is Why - B J Lin 2010 wFD .3!
Contents s QkP@Y
Preface .................................................................................................... nz(OHh!}u
Chapter 1 Introducing Optical Lithography )-mB^7uXGv
Chapter 2 Exposure Systems anbr3L[!
Chapter 3 Image Formation _> *"6
Chapter 4 The Metrics of Lithography lyy i?/W%
Chapter 5 Components in Optical Lithography A[o Ri}=
Chapter 6 Processing and Optimization b#b#r
Chapter 7 Immersion Lithography ("{'], >
Chapter 8 Outlook and Successors to Optical Lithography
